Reuters reported that Shanghai Aishengna Electronics Technology Group is leading production of domestically made immersion deep ultraviolet, or DUV, lithography machines in China, according to Ming Pao.
The report also cited sources as saying the DUV lithography machines still need further testing and remain far behind similar products from ASML.
Reuters Reports Shanghai ASML-Linked Group Leads China DUV Lithography Machine Production
2026-07-28 09:19:18
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