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Intel to Use ASML's Next-Generation Lithography Machines for Some Panther Lake Laptop Chips

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2026-07-15 05:11:39
Intel has decided to use ASML's high-end equipment to produce some of its flagship Panther Lake laptop chips, according to Jin10. ASML announced on Tuesday that Intel began trials in 2024 and has started using ASML's next-generation high numerical aperture extreme ultraviolet lithography machines. The machines, which cost approximately $400 million each—double the price of standard EUV lithography tools—transfer circuit patterns onto wafers to help produce some Panther Lake processors. Integrating the equipment into the production process is also technically challenging. Intel is using the high numerical aperture machines to test specific layers of the chips, which will help both Intel and ASML collect data and optimize the equipment.
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